Capacitive Position Sensors (Capacitance Sensors)

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PI Capacitive Position Sensor Solutions feature the Highest Resolution (0.01 nanometer) of all commercially available position sensors.   Click on "Introduction" to learn more about PI Capacitive Position Sensor Solutions and their applications.
Capacitive Position Sensors with Control Module	Capacitive Position Sensors in an ultra-high-resolution 6-degree-of-freedom NanoPositioning system designed by PI for the PTB (German Institute of Standards). Application: Scanning Microscopy

Contents

• Introduction p. 5-1

Capacitive Position Sensors/Controllers Featuring Sub-Nanometer Resolution p. 5-1
Why Can PI Provide Superior Capacitive Sensor Solutions p. 5-2
• D-015,D-050,D-100 Sub-Nanometer-Resolution Capacitive Position Sensors p. 5-4

Technical Data,Capacitive Sensors and Electronics p. 5-5
Characteristics of Capacitive Position Sensors p. 5-6
Resolution p. 5-4
Stability and Linearity of PI Capacitive Position Sensors p. 5-6
Insensitivity to Cable Influences p. 5-7
Materials Match p. 5-7
Electrode Geometry,Sensor Surface Flatness and Finish p. 5-7
Parallelism of Positioner Measuring Surfaces p. 5-8
Electronics Support p. 5-8
Setup and Range p. 5-8

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