Back
To
PI
Index
| 2-phase microstepper |
9-17 |
| ~stepper motor stages |
7-5,
7-6,
7-15 |
| 5-phase microstepper |
9-4 |
| ~stepper
motors, |
7-74,
9-4 |
| 6-axis |
|
| ~active
error compensation |
2-32,
2-35,
4-45,
5-2 |
| ~MicroMotion
Robot |
7-16,
8-8 |
| |
|
| |
|
| AB
(quadrature) TTL signals |
9-13,
9-15 |
| Absolute
accuracy |
4-10,
4-18,
7-10,
7-12 |
| Acceleration |
|
| ~of
motor drive |
7-11 |
| ~of
PZT |
4-3,
4-8,
4-26,
4-40 |
| ~sensors |
1-34 |
| ~in
controller |
9-11,
9-14 |
| Accuracy |
A-8,
4-10,
4-20,
4-34,
4-35 |
| ~and
mounting |
1-7 |
| ~and
temperature |
4-38 |
| ~of
MicroPositioners |
7-1,
7-9,
7-10,
7-12,
7-15,
7-43 |
| ~of
NanoPositioners |
2-1,
2-2 |
| ~of
platforms |
3-1 |
| ~of
sensors |
4-21,
5-2,
5-4,
5-7 |
| ~of
translators |
1-2 |
| Active |
|
| ~error
compensation |
2-32,
4-14 |
| ~optics |
A-19,
A-12,
A-15,
1-3,
3-1ff.,
4-4,
4-11,
4-14 |
| ~optics,
PZT controller |
6-3,
6-12,
6-40_41 |
| ~power |
4-33,
6-26 |
| ~secondary
mirrors |
3-2,
3-3 |
| ~trajectory
control |
2-2,
2-3,
2-4,
2-8,
4-1,
4-45 |
| ActiveDriveTM motor |
7-1, 7-15,
7-32,
7-34,
7-35,
7-36, |
| ~7-37,
7-38,
7-39,
7-42,
7-43,
7-46, |
7-56,
7-60,
7-81,
8-20,
8-21,
9-3 |
| ~motor
(controller for) |
9-10,
9-12 |
| Actuator |
|
| ~linear,
piezoelectric (PZT) |
1-1
末 1-40 |
| ~stiffness |
4-23 |
| adapters
(for stacking stages) |
7-84
末 7-95 |
| Adaptive |
|
| ~mechanics |
1-26,
1-28,
1-30 |
| ~optics |
A-19,
1-3,
3-1,
3-12,
4-4,
4-11,
4-14,
6-3 |
| Algorithm |
|
| ~
6-axis control |
7-16,
8-8,
8-9 |
| ~active
optics |
3-1,
3-7 |
| ~alignment/scanning |
8-2,
8-3,
8-14,
8-15 |
| ~InputShapingTM |
4-1,
4-6,
4-32,
4-36,
6-1,
6-2,
8-6 |
| ~InputShapingTM ,
explained |
4-36,
4-37 |
| ~motor controller |
9-8,
9-12,
9-14,
9-17 |
| ~PZT
control |
2-2,
6-1,
6-2,
6-12 |
| Alignment |
2-38,
4-15,
4-20 |
| ~automation |
8-2,
8-3 |
| ~software |
8-10,
8-17 |
| ~algorithm |
6-14,
7-7,
9-6 |
| ~fiber
/ collimator / MEMs / array |
8-1
末 8-26 |
| ~optics |
3-1,
3-3 |
| Aluminum stages |
7-22,
7-23 |
| Amplifier |
|
| ~noise |
4-5,
4-18 |
| ~output current |
4-31 |
| ~power |
6-40_41 |
| ~rise
time |
4-32 |
| ~DC servo |
9-4 |
| ~DC servo, integrated |
see ActiveDriveTM |
| ~PZT |
6-6 |
| Analog |
|
| ~H-bridge |
9-13, 9-15 |
| ~joystick |
9-18 |
| Angle |
|
| ~bracket |
7-36,
7-91,
7-92 |
| ~brackets,
selection table with |
7-82,
7-83 |
| Angular |
|
| ~motion,
definitions/equations |
3-7,
3-8,
7-10,
7-13,
7-49 |
| ~motion,
rotation stages |
7-6 |
| ~motion,
tip/tilt platforms |
2-8,
3-5,
7-63 |
| ~motion,
see also 6-axis motion |
|
| Arrayed
fibers |
8-8 |
| Astronomical |
|
| ~telescopes |
A-19,
3-1
末 3-4, 7-3,
7-16,
8-8 |
| Atmosphere,
PZT operation in |
4-39 |
| Atmospheric
turbulence |
3-2,
3-3 |
| Atomic
Force Microscope |
A-12,
4-10,
4-18,
5-2 |
| Autofocus |
A-20,
2-2,
2-12 |
| Automatic |
|
| ~alignment |
6-14,
8-8
末 8-21 |
| ~backlash
compensation |
7-10 |
| ~coordinate
transformation |
3-7,
6-8,
7-16,
8-4,
8-8 |
| ~path
planning |
8-8 |
| ~runout
compensation |
2-28,
2-32,
2-35 |
| ~zero
adjust |
6-8 |
| |
|
| |
|
| Backlash |
1-2,
4-7,
4-18,
4-44,
7-10 |
| Ball
bearings |
2-1,
4-18,
4-45,
7-13 |
| Ball
bearings, products with |
7-30,
7-36,
7-40,
7-44,
7-48 |
| Ball
tip |
1-2,
1-7,
1-40,
4-47,
7-67,
7-69,
7-73 |
| Barium
titanate |
4-15 |
| Beam |
|
| ~deflection |
1-34 |
| ~switching |
A-11,
3-1
, 3-14, 8-2 |
| Bender,
piezo actuator |
1-6,
1-34,
4-43 |
| Bidirectional
repeatability |
2-2,
2-20,
4-35,
7-10 |
| Bimorph |
|
| ~actuators |
4-6,
4-43,
6-32 |
| ~benders |
1-34,
4-43 |
| ~disk
actuators |
1-32,
4-43 |
| ~controller |
6-32 |
| Blocked
force |
4-27 |
| BNC
adapter/cable |
6-42_45 |
| Bode
plot |
6-3,
6-8,
6-9 |
| Bragg
grating, fiber |
A-10,
A-11,
8-6 |
| Break-point
capability |
7-19,
9-15 |
| |
|
| |
|
| Cable
Adapters for PZTs |
6-42_45 |
| Cable
management issues |
2-26,
2-28,
2-30,
2-32,
2-35,
8-8,
8-9 |
| Cage
migration |
7-13 |
| Capacitive
position sensors |
5-1
末 5-8 |
| Ceramic
tubes |
1-35,
4-42 |
| Ceramic,
PZT |
1-3,
2-1,
3-1,
4-1 |
| Charge
currents |
6-40_41 |
| Closed-loop
vs open-loop |
4-11,
4-20,
6-8ff.,
7-15 |
| Closed-loop,
devices |
see
Selection Guides- |
| CMM |
A-7 |
| Coefficient |
|
| ~of
dynamic friction |
7-12 |
| ~of
static friction |
7-12 |
| ~of
thermal expansion |
4-8 |
| Co-fire
(ceramics) |
1-34,
4-7 |
| Collimator
alignment |
A-5,
8-1,
8-4,
8-9 |
| Compliance |
4-7 |
| Compressive
force, load limit |
4-23,
4-23,
4-27 |
| Continuous
path |
9-8 |
| Contraction type PZT |
4-41 |
| Controllers |
|
| ~integrated
with drive |
7-44,
9-17 |
| ~MicroPositioner |
9-1
末 9-17 |
| ~network |
7-44,
9-1,
9-3,
9-10,9-17,9-7 |
| ~PZT
module configuration & ordering |
6-21
末 6-23 |
| ~PZT
NanoPositioner |
2-35,
6-1
末 6-42_45 |
| ~PZT,
typical |
6-40_41 |
| Conversion
of units |
4-48 |
| Coordinate
transformation |
3-7,
6-8,
7-16,
8-4,
8-8 |
| Creep |
4-20 |
| Crossed
roller bearings |
7-13 |
| Crystal,
PZT |
4-15,
4-20 |
| Curie
temperature |
4-15 |
| Curie,
Jaques & Pierre |
4-9 |
| Custom |
|
| ~
5-phase stepper-motor |
9-3 |
| ~actuator |
1-4,
7-3 |
| ~ceramics |
1-2 |
| ~Hexapod |
7-3,
7-4,
7-17 |
| ~NanoPositioning
experience |
2-3 |
| ~piezo
actuators |
1-4 |
| Custom
(cont.) |
|
| ~piezo
motor |
9-2 |
| ~piezo-motor
controller |
9-1 |
| ~translation
stage |
7-3 |
| ~voice-coil-driven
scanner |
7-3 |
| CyberAlignerTM
software |
8-17 |
| |
|
| |
|
| Daisy-chain
network |
7-44,
9-1,
9-7,
9-10,
9-17 |
| DC-Mike
actuator |
7-66
末 7-73 |
| DC-servo
motor |
7-11 |
| DC-motor
controller |
9-1,
9-4,
9-14 |
| Definitions
of terms |
|
| ~MicroPositioners |
7-9
末 7-15, 7-96 |
| ~of
terms, NanoPositioners |
1-41
末 1-43, 2-44, 3-16,
4-7 |
| Deflection |
1-34,
4-43 |
| Design
resolution |
7-11 |
| Dielectric |
1-3,
1-38,
4-8,
4-33 |
| Differential |
|
| ~encoder |
7-81 |
| ~micrometer
(drive) |
7-24,
7-80 |
| Differential-drive
tilt platforms |
3-7,
3-16 |
| Digital |
|
| ~controllers
(MicroPositioning) |
9-1
末 9-17 |
| ~controllers
(NanoPositioning, PZT) |
6-4,
6-8,
6-12 |
| ~controllers
(special for P-587 6-axis NanoPositioner) |
2-35 |
| ~controllers,
F-206 MicroMotion Robot |
8-14 |
| ~linearization
algorithm |
6-12 |
| Dipole |
4-15 |
| Direct
output metrology |
7-36,
7-42,
7-61 |
| Disk
drive testing |
A-13 |
| Disk
translators |
1-32,
4-43 |
| DOCC,
explained |
4-32 |
| Domain
(crystaline) |
4-15 |
| Drift |
4-20,
5-6 |
| Drive
types |
|
| ~motor |
7-14 |
| ~PZT |
2-1,
4-41 |
| ~voice-coil |
7-3,
7-18,
7-19 |
| Dynamic |
|
| ~forces |
4-27,
4-32 |
| ~operating
current coefficient |
4-32 |
| ~small-signal
stiffness |
4-24 |
| |
|
| |
|
| Effective
mass |
4-27,
4-28 |
| Electric
field strength |
4-17,
4-19 |
| Electrode |
4-43 |
| Electron
guns |
7-16 |
| Electronic
gearing |
9-12,
9-13,
9-14,
9-15 |
| Electro-physiology |
A-16 |
| Electrostrictive
actuators |
4-6,
4-46 |
| Embossing
(sample calculation) |
4-25 |
| EMI |
4-10,
6-12 |
| Encoders |
|
| ~linear
scale |
7-15,
7-36,
7-40 |
| ~optical |
7-15 |
| Energy
recovery |
4-33,
6-26 |
| English
and metric units |
4-48 |
| Environmental
considerations |
4-39 |
| Extended
temperature range |
1-39 |
| Extension
cables for PZTs |
6-42_45 |
| |
|
| |
|
| Fast
fiberlink Interface |
2-20,
6-12 |
| Fast
voice-coil drive |
9-1 |
| Fast
voice-coil scanners |
7-18,
7-19 |
| FBG
writing |
A-11,
8-6 |
| FEA
(finite element analysis) design |
2-2,
4-44,
7-16,
8-16 |
| FFT
(fast Fourier transformation) |
4-37 |
| Fiber |
|
| ~adapter
interface |
8-13,
8-16 |
| ~alignment |
A-10,
A-11,
1-15,
6-14,
7-24,
8-1
末 8-26 |
| ~array |
8-4,
8-11,
8-13 |
| ~Bragg
grating |
A-10,
A- ~11, 8-6 |
| ~holders |
8-26 |
| ~optics |
A-10,
A-11,
2-14,
2-16,
2-20 |
| ~optics
testing |
A-10 |
| ~rotation
stage |
7-3 |
| Fiberlink
Interface, (fiber-optic interface) |
6-3,
6-12 |
| Fiber
optics |
A-10,
A-11 |
| Finite
element analysis |
2-2,
4-44,
7-16,
8-16 |
| Flatness |
4-45 |
| Flexible
automation |
7-72,
8-12,
9-7,
9-10,
9-12,
9-14,
9-17 |
| Flexible
tip |
1-7,
1-40 |
| Flexure
(guiding) |
2-2,
4-45,
7-13 |
| Flexure
NanoPositioners |
2-1ff.,
8-16 |
| Force
generation |
1-26,
1-28,
1-30,
4-23,
4-25 |
| Force
limiting/sensing platform |
8-7,
8-15 |
| Friction |
2-1,
7-11
末 7-15 |
| Frictionless
guiding |
(see
flexure) |
| |
|
| |
|
| Glossaries/definitions |
|
| ~MicroPositioners |
7-9
末 7-15, 7-96 |
| ~NanoPositioners |
1-41
末 1-43, 2-44, 3-16,
4-7 |
| Guiding
techniques |
2-1,
4-1,
4-27,
4,45, 7-11,
7-13
末 7-16,
8-9 |
| |
|
| |
|
| Hard
drive testing |
A-13 |
| Hawaii |
3-2 |
| Head/media
test |
A-13 |
| HexalignTM
Six-Axis MicroMotion Robot and Alignment System |
8-8 |
| 末
8-15 |
|
| Hexapod |
|
| ~design |
7-2,
8-2,
8-8,
8-11 |
| ~F-206
(illustrations) |
A-6,
A-10,
3-3,
7-1,
7-9,
8-2, |
| ~8-3,
8-4,
8-8
末 8-11,
8-14 末 8-17,
9-3 |
|
| ~higher-load
(M-850) product description |
7-16 |
| ~higher-precision
(F-206) product description |
8-12
末 8-15 |
| ~M-850
(illustrations) |
A-0,
A-10,
A-14,
A-16,
A-17,
A-18, |
| ~A-19,
3-3,
7-1,
7-2,
7-3,
7-4,
7-16,
8-2,
8-3 |
|
| ~M-850
custom |
A-8,
A-16,
A-19,
3-3,
7-3,
7-4,
7-16 |
| ~M-850
custom "nonapod" |
7-17 |
| High-power
HVPZT amplifier |
6-26 |
| High-vacuum
options |
1-40,
4-39 |
| HVPZT
(high voltage PZT) |
4-7,
4-10,
4-18 |
| ~amplifiers |
6-6 |
| ~stack
actuators |
1-8,
4-7 |
| ~translators |
1-8 |
| ~tube
actuators |
1-35 |
| Hydraulic
valves |
4-11,
4-14 |
| Hysteresis |
4-20,
7-11 |
| |
|
| |
|
| ID
chip |
2-14,
2-20,
2-22,
2-35,
6-8,
6-12 |
| ILS |
5-6 |
| Image
stabilization |
A-17,
3-1
末 3-16 |
| Imaging
software |
2-10,
2-12 |
| Industrial
automation |
8-1 |
| Industrial
reliability of PZT materials |
4-9 |
| Inert
gas atmosphere |
4-6 |
| Infinity-corrected
microscope |
2-10,
2-12 |
| Injector
nozzle valves |
4-11 |
| Ink
jet |
1-3,
1-35,
4-42 |
| InputShapingTM |
4-1,
4-6,
4-32,
4-36,
6-1,
6-2,
6-12,
8-6 |
| InputShapingTM ,
explained |
4-36,
4-37 |
| Inspection |
A-7,
A-14,
1-3,
4-4,
A-20 |
| Insulation
materials |
4-21,
4-40Integrated |
| ~amplifier |
9-3 |
| ~controller
(in motor) |
9-17 |
| ~controller
(in stage) |
7-44 |
| IntellistageTM
Translation Stage |
7-44 |
| IntellistepTM
Stepper Motor |
9-17 |
| Interferometer |
|
| ~as
sensor |
9-10,
9-14 |
| ~as
testing tool |
A-7,
4-11 |
| ~testing
F-206 |
8-14 |
| ~vs
cap sensor |
5-4 |
| Interferometry,
applying PZTs in |
A-20 |
| Internal
spring preload |
1-6,
1-7,
4-23,
4-41 |
| Invar |
5-7,
1-43,
2-2,
2-3,
2-7,
2-35 |
| ~3-12,
3-13,
3-14,
3-15,
3-17 |
|
| Inverse
piezo effect |
4-9 |
| Ions |
4-15 |
| IRTF
(Infrared Telescope Facility) |
3-3 |
| |
|
| Joystick |
9-18 |
| |
|
| |
|
| Keck
Observatory |
3-3 |
| Keyboard
(F-206.00D controller) |
8-8 |
| Keypad
(C-600 controller) |
9-8 |
| |
|
| |
|
| LabviewTM
Drivers |
2-36,
6-37,
7-19,
8-8,
8-16,
9-6,
9-12,
9-14 |
| Laminar
design, PZTs |
4-23,
4-24,
4-41 |
| Lance
macro editor |
7-44 |
| Large-aperture |
|
| ~devices |
2-30,
2-31 |
| ~hexapod |
7-17 |
| ~tip/tilt
platform |
3-3 |
| Large-signal
behavior |
4-28 |
| Laser |
|
| ~beam
stabilization |
3-1,
3-10,
3-12,
3-14,
A-17 |
| ~beam
steering & scanning |
A-17 |
| ~cutting |
A-21 |
| ~interferometer
as sensor |
9-10,
9-14 |
| ~interferometer
as testing tool |
A-7,
4-11 |
| ~interferometer
testing F-206 |
8-14 |
| ~interferometer
vs cap sensor |
5-4 |
| ~interferometry,
applying PZTs in |
A-20 |
| ~tuning |
1-3,
1-9,
1-10
末 1-26,
2-14,
4-4,
8-1,
8-6 |
| LCD
flat panel test |
A-14 |
| Lead
zirconate titanate |
4-15 |
| Leadscrew |
7-9,
7-10,
7-32,
7-34 |
| Leakage
current |
4-30 |
| LEMO
connectors |
6-42_45 |
| Lens
testing |
A-14,
7-18,
7-19 |
| Life
sciences, products for |
A-16 |
| Lifetime
testing |
A-5 |
| Limit
switches, MicroPositioners, with |
7-5,
7-6 |
| Linear |
|
| ~actuators,
motorized |
7-66
末 7-75 |
| ~actuators,
piezoelectric |
1-6 |
| ~encoders |
7-15,
7-36,
7-40,
7-42 |
| ~interpolation |
9-8 |
| ~motor |
7-3,
7-4,
7-5 |
| ~piezo-motor
drive |
7-3,
7-4 |
| ~power
amplifiers |
9-12,
9-14 |
| ~rails
(guiding system) |
7-13 |
| ~scale
encoders |
7-15,
7-36,
7-40 |
| ~scanners |
9-2 |
| ~sensors |
4-21,
4-22,
5-3 |
| ~stages,
principles of |
7-12ff. |
| Linear
variable differential transformer (LVDT) sensors |
2-8,
4-21 |
| Linearity
error |
5-5,
7-10 |
| Linearity,
measuring |
5-6 |
| Linearization |
4-36,
5-6 |
| LISA
linear stage actuators |
2-22,
2-23 |
| Load
capacity / force generation |
4-12 |
| Lockable
micrometer (spindle) |
7-24,
7-79 |
| Long-travel
piezo flexure stages |
2-9 |
| Loss
power |
4-33,
6-26,
6-40_41 |
| Low-voltage
PZT amplifiers |
6-6 |
| Low-noise
amplifiers |
6-6 |
| Low-profile
translation stages |
7-36ff. |
| Low-temperature
option (translators) |
1-39,
4-38 |
| Low-voltage |
|
| ~actuators |
1-6,
2-8 |
| ~operation |
6-30,
6-31 |
| ~PZT |
4-7,
4-10,
4-13 |
| LVDT
(linear variable differential transformer) position sensors |
2-8,
4-21 |
| LVPZT
(low-voltage PZT) |
|
| ~amplifiers |
6-6 |
| ~extension
cable |
6-42_45 |
| ~translators |
1-6,
2-8 |
| |
|
| |
|
| Magnetic-kinematic
ball bearings |
7-12 |
| Manual
translation stages |
7-5 |
| Mask
alignment |
A-14 |
| Material
properties |
4-15 |
| Materials
match (sensors) |
5-7 |
| Mechanical
considerations |
1-7,
4-12,
4-23,
7-12 |
| Media
test |
A-13 |
| MEMs |
|
| ~device
under test |
A-7,
8-6 |
| ~positioning/alignment |
A-10,
8-2 |
| MercuryTM
motion controller |
9-10 |
| Metric
and English units |
4-48 |
| Metrology |
A-20,
1-6,
2-8,
7-5,
7-6,
8-7 |
| Micro-ablation |
6-12 |
| Micro-dispensing |
1-35,
4-4,
7-18,
7-19 |
| Micromachining/Micromanufacturing |
2-6,
7-2,
8-1 |
| ~product
selection |
A-18,
2-8,
7-5,
7-6,
8-1,
8-7 |
| Micromanipulation |
A-18,
1-3,
2-8,
4-4,
8-7 |
| Micromanufacturing |
A-18,
2-32,
7-18,
7-19 |
| Micrometer
tip, non-rotating |
7-66
末 7-78 |
| Micrometer,
product selection |
7-6 |
| Micrometer-mountable
PZT translators |
1-12 |
| MicroMotion
Robot (Hexapod) |
|
| ~design |
7-2,
8-2,
8-8,
8-1 |
| ~F-206
(illustrations) |
A-6,
A-10,
3-3,
7-1,
7-9,
8-2,
8-3, |
| ~8-4,
8-8
末 8-11, 8-14 末 8-17,
9-3 |
|
| ~higher-load
(M-850) product description |
7-16 |
| ~higher-precision
(F-206) product description |
8-8
末 8-15 |
| ~M-850
(illustrations) |
A-0,
A-10,
A-14,
A-16,
A-17,
A-18, |
| ~A-19,
3-3,
7-1,
7-2,
7-3,
7-4,
7-16,
8-2,
8-3 |
|
| ~M-850
custom |
A-8,
A-16,
A-19,
3-3,
7-3,
7-4,
7-16 |
| ~M-850
custom "nonapod" |
7-17 |
| MicroPositioning |
|
| ~controllers/drivers |
9-4 |
| ~fundamentals |
7-9ff. |
| ~robots |
A-18,
7-16,
8-8 |
| ~stages |
7-5,
7-6 |
| ~vs
NanoPositioning |
2-1,
7-9 |
| Microscope |
|
| ~objective
holder |
8-26 |
| ~objective
NanoPositioner |
2-10,
2-12 |
| Microscope,
scanning tunnelling |
5-1 |
| Microscopy |
A-12,
2-10,
2-12,
7-26,
7-28 |
| Microstep |
|
| ~controllers |
9-7,
9-8 |
| ~motors |
7-5,
7-6,
7-15 |
| Microstep,
integrated motor/controller |
9-17 |
| Microsurgery |
A-16,
8-9 |
| Microwave
antenna |
A-17,
7-16 |
| Miniature |
|
| ~PZT
flexure stage |
2-17 |
| ~tilt
platforms |
3-9 |
| ~translation
stage |
7-20 |
| Minimum
incremental motion |
7-11 |
| Mirror,
tip/tilt, steering |
3-1
末 3-17 |
| Momentum
compensation |
A-21,
1-30,
3-3,
4-13 |
| Monolithic
ceramic |
4-42,
4-43 |
| Motion
amplifier |
2-41
末 2-43, 4-44 |
| MotionBasicTM
Programming |
9-8 |
| Motor |
|
| ~brake
output |
9-13 |
| ~controller,
integrated in motor |
9-17 |
| ~controller,
integrated in stage |
7-44 |
| ~controllers |
9-1ff. |
| Motorized |
|
| ~stages,
examples |
7-4 |
| ~stages,
fundamentals |
7-9
末 7-15 |
| ~stages,
product selection |
7-5,
7-6 |
| Mounting |
|
| ~adapters/accessories |
7-84
末 7-95 |
| ~guidelines
for PZT translators |
1-7 |
| Multi-axis |
|
| ~automation
platform |
8-20 |
| ~piezo
tip/tilt platform |
3-5 |
| ~precision
DC-motor controllers |
9-5 |
| ~precision
stepper-motor controllers |
9-5 |
| ~PZT
NanoPositioning flexure stages |
2-1,
2-9,
4-45,
7-13,
8-16 |
| ~scanning |
7-16,
8-8 |
| ~stage
stacks |
4-1,
8-3,
8-18 |
| Multilayer |
|
| ~actuator |
4-2,
4-7,
4-10 |
| ~actuator
selection |
1-6 |
| ~bender |
1-34,
4-43,
6-32 |
| Multimorph |
4-6,
4-43 |
| |
|
| |
|
| NanoAlignTM
Upgrade |
8-7 |
| NanoAutomation® |
|
| ~controllers |
6-6,
6-8,
6-10,
6-12,
6-46 |
| ~stages |
2-14,
2-20,
2-22 |
| NanoCaptureTM
software |
6-9 |
| NanoCubeTM
controller |
6-14,
6-15 |
| NanoCubeTM |
|
| ~fiber
alignment |
8-15
末 8-17, 8-26 |
| ~mounting
adapter |
7-88 |
| ~stage |
2-36,
8-16 |
| NanoPositioner,
6-axis |
2-9,
2-32,
2-35,
2-36,
8-16 |
| NanoPositioners,
controller selection |
6-6,
6-21
末 6-23,
6-40_41 |
| ~selection |
1-6,
2-8,
3-5,
8-7 |
| NanoPositioning |
1-1ff.,
2-1ff.,
3-1ff.,
4-1ff., |
| ~5-1ff.,
6-1ff.,
8-1ff. |
|
| ~vs.
Micropositioning |
2-1,
7-9 |
| NASA |
3-2,
3-3 |
| Network
capability (daisy chain) |
7-44,
9-7,
9-10,
9-17 |
| Non-rotating
tip |
7-15,
7-66,
7-68,
7-72,
7-74,
7-78 |
| Normal
atmospheres |
4-39 |
| Normal
(perpendicular) load capacity |
7-96 |
| Notch
filter |
6-40_41 |
| |
|
| |
|
| Objective
and Waveguide Holders |
8-26 |
| ~extension
tubes |
2-13 |
| ~NanoPositioner |
2-10,
2-12 |
| OEM
versions |
|
| ~custom |
1-3 |
| ~MicroPositioner
controllers |
9-7,
9-10,
9-17 |
| ~MicroPositioners |
7-5,
7-6 |
| ~PZT
controllers |
6-6,
6-7,
6-46 |
| ~PZTs |
1-34,
1-36,
2-36,
8-16 |
| Open-loop |
4-11,
4-35 |
| ~vs
closed-loop |
4-11,
4-20,
6-8ff.,
7-15 |
| ~devices |
see
Selection Guides |
| Optical |
|
| ~device
testing |
8-9,
8-24,
A-14 |
| ~disk |
3-1 |
| ~fiberlink
Interface |
6-12 |
| ~linear
encoder |
7-42 |
| ~metrology |
6-14,
8-13,
8-16 |
| ~switch |
4-11 |
| Optics,
active |
A-19,
3-1ff. |
| ~fiber |
A-10,
A-11,
8-1ff. |
| ~inspection |
A-14,
A-20,
7-28,
7-40 |
| ~microscopy |
A-12,
1-6,
2-8 |
| ~wafer |
A-14,
A-15 |
| Orthogonality
error |
4-1,
7-12 |
| Oscillation |
4-32,
7-10 |
| Outgassing |
1-40,
4-21 |
| Overshoot |
4-29,
4-32,
6-9 |
| |
|
| |
|
| Parallel
kinematics |
2-35,
7-16,
8-8,
4-1 |
| Parallelogram
guiding system |
4-45,
7-13 |
| Patch
clamping |
A-16,
1-14,
1-32,
2-24 |
| Path
planning, trajectory control |
8-8 |
| PC
plug-in DC-motor controller |
9-14 |
| PCB
inspection |
2-41 |
| PCI
bus |
6-12,
9-15 |
| Permittivity |
4-17 |
| Phase
margins |
4-31 |
| Photonics |
A-10,
8-1
末 8-26 |
| ~alignment,
voice-coil drive |
7-18,
7-20 |
| Picometer |
4-22,
5-4 |
| PID
(proportional, integral, derivative) servo-algorithm |
7-11 |
| ~servo-controller |
9-10,
9-11,
9-12,
9-14 |
| ~voice-coil
stage |
7-19 |
| Piezo |
|
| ~actuator |
1-1ff. |
| ~actuator
stiffness |
4-23 |
| ~and
motor combinations |
4-14 |
| ~benders |
1-3,
1-34 |
| ~ceramic
actuators |
4-15 |
| ~ceramic
rings |
1-3,
1-35 |
| ~ceramic
stacks |
1-2 |
| ~ceramic
stiffness |
4-23 |
| ~coefficients |
4-5,
4-17 |
| ~control
electronics, selection |
6-6,
6-7 |
| ~control
electronics, typical characteristics |
6-40_41 |
| ~disk
cutting |
A-9 |
| ~disk
translators |
A-18 |
| ~drive |
2-43 |
| ~dynamics |
4-36 |
| ~effect |
4-3,
4-4,
4-15,
4-38 |
| ~fiber
alignment |
8-16 |
| ~fine
range |
7-5,
7-6,
8-18 |
| ~flexure
NanoPositioner |
2-1ff. |
| ~gain |
4-19 |
| ~materials |
1-38,
4-15
末 4-20 |
| ~motor
drives |
7-3,
7-4 |
| ~NanoAlignment |
7-30,
8-20 |
| ~NanoAutomation® |
6-4 |
| ~NanoPositioning
tutorial |
4-1ff. |
| ~precision
tangent-arm rotation stages |
7-7,
7-49 |
| ~pumps |
1-35 |
| ~resolution |
4-18 |
| ~steering
mirrors |
3-1ff. |
| ~strain
coefficients |
4-19 |
| ~tilt
platforms |
3-1ff. |
| ~tilt
stages |
2-3,
3-5 |
| ~translators |
1-1ff.,
2-1ff.,
3-1ff. |
| Piezoelectric |
see
Piezo |
| PiezoMikeTM |
7-77 |
| PIFOC®
Objective NanoPositioner |
2-10,
2-12 |
| Pitch,
yaw and roll |
7-10 |
| PivotAnywhereTM
feature |
7-16,
8-8 |
| PMN
actuators |
4-46 |
| Pneumatic
valves |
1-32 |
| Polarization |
4-15,
4-20 |
| Pole
tip recession |
1-3 |
| Poling |
4-15 |
| Polynomial
linearization |
5-5,
5-6,
6-8 |
| Position
sensors |
4-21,
5-6 |
| Power
amplifier |
|
| ~integrated
in translation stage |
see
ActiveDriveTM |
| ~for
piezo positioning systems |
6-6,
6-40_41 |
| Practical
resolution |
7-11 |
| Precision
guiding system |
2-1,
4-13,
7-13 |
| Precision
machining |
A-21 |
| Preloaded |
|
| ~bearings |
7-13 |
| ~piezo
actuators |
1-7,
1-8,
4-17,
4-41 |
| ~worm
drive |
7-56,
7-58,
7-60 |
| Programming
fiber alignment |
8-10,
8-17 |
| ~IntellistagesTM |
7-44 |
| ~LabViewTM
drivers |
2-36,
6-37,
7-19,
8-8,
8-16,
9-6,
9-12,
9-14 |
| ~libraries
for C, Pascal, etc. |
7-19,
9-12,
9-14 |
| ~MicroMotion
robot |
7-16,
8-10 |
| ~MicroPositioners |
9-11
末 9-16 |
| ~MotionBasicTM |
9-8 |
| ~NanoAutomation®
controller |
6-8,
6-12 |
| Pulse
width modulation (PWM) |
|
| ~controllers |
7-12,
9-10,
9-12 |
| ~motors
with |
see
ActiveDrive |
| PZT
(actuator, translator) |
Section
1, 2, 4, 4, 6 |
| ~active
optics |
A-12,
A-15,
A-19,
1-3,
3-1ff.,
4-4,
4-11,
4-14,
6-3 |
| ~actuator |
1-1ff. |
| ~actuator
stiffness |
4-23 |
| ~actuators
Selection Guide |
1-6 |
| ~amplifiers |
6-6 |
| ~and
motor combinations |
4-14 |
| ~benders |
1-3 |
| ~ceramic |
A-9 |
| ~ceramic
actuators |
4-15 |
| ~ceramic
rings |
1-3,
1-35 |
| ~ceramic
stacks |
1-2 |
| ~ceramic
stiffness |
4-23 |
| ~ceramics |
1-2 |
| ~ceramics,
custom |
1-38 |
| ~coefficients |
4-5,
4-17 |
| ~control
electronics, selection |
6-6,
6-7 |
| ~control
electronics, typical characteristics |
6-40_41 |
| PZT
(cont.) |
|
| ~crystal |
4-15 |
| ~disk
cutting |
A-9 |
| ~disk
translators |
A-18 |
| ~drive |
2-43 |
| ~dynamics |
4-36 |
| ~effect |
4-3,
4-4,
4-15,
4-38 |
| ~fiber
alignment |
8-16 |
| ~fine
range |
7-5,
7-6,
8-18 |
| ~flexure
NanoPositioner |
2-1ff. |
| ~Flexure
NanoPositioners |
2-xx |
| ~gain |
4-19 |
| ~materials |
1-38,
4-15
末 4-20 |
| ~motor
drives |
7-3,
7-4 |
| ~NanoAlignm1ent |
8-20 |
| ~NanoAutomation® |
6-4 |
| ~NanoPositioning
tutorial |
4-1ff. |
| ~precision
tangent-arm rotation stages |
7-7,
7-49 |
| ~pumps |
1-35 |
| ~resolution |
8-2 |
| ~servo-controller |
6-20,
6-21,
6-24,6-26,
6-36,
6-40_41 |
| ~stack
actuators |
1-8,
4-13,
4-30 |
| ~steering
mirrors |
3-1ff. |
| ~stiffness |
4-27 |
| ~strain
coefficients |
4-19 |
| ~tilt
platforms |
3-1ff. |
| ~tilt
stages |
2-3,
3-5 |
| ~translators |
1-1ff.,
1-2,
1-8,
2-1ff.,
3-1ff.,
4-41 |
| PZT
(plumbum zirconium titanate) |
4-7 |
| PZT
ceramic materials |
1-38,
4-15
末 4-20 |
| |
|
| |
|
| Quadrature
TTL |
9-10,
9-14 |
| Quickscan
Voice Coil |
7-18 |
| |
|
| |
|
| Reactive
power recovery |
4-33,
6-26 |
| Real-time
feedforward |
4-36 |
| Real-time
operating system |
6-12 |
| Recirculating
ball bearings |
7-13 |
| Remanent
polarization |
4-20 |
| Remanent
strain |
4-23 |
| Repeatability |
4-34,
4-45,
7-10 |
| Resolution |
4-10,
4-18,
7-12 |
| Resonance |
4-32,
4-36,
8-6 |
| Resonant
frequency |
4-28 |
| Ringing |
4-36 |
| Rise
time |
4-32 |
| Robot |
A-18,
7-16,
8-4,
8-8 |
| Roll,
yaw and pitch |
7-10 |
| Rotary
alignment |
8-5,
8-8,
7-16 |
| Rotation
stages |
7-7 |
| Runout |
|
| ~automatic
compensation |
2-28,
2-32,
2-35,
4-45 |
| ~defined |
7-12 |
| |
|
| |
|
| Scanning microscopy |
A-12,
4-42,
5-2 |
| SCPI
command language |
9-12 |
| Screen
printing |
1-3,
4-16 |
| S-curve
profile |
9-12 |
| Selection
Guide |
|
| ~PZT
actuators |
1-6 |
| ~PZT
flexure NanoPositioners |
2-8 |
| ~PZT
active optics tip/tilt platforms |
3-5 |
| ~PZT
amplifiers/controllers |
6-6 |
| ~MicroPositioners |
7-5,
7-6 |
| ~Photonics |
8-7 |
| ~Motion
Controllers |
9-4 |
| Secondary
mirror platforms |
A-19,
3-1ff.,
7-16 |
| Semiconductors |
A14,
A-15,
A-19,
7-16 |
| Sensors |
4-21,
5-1ff. |
| Sensor
bandwidth |
5-6,
6-36,
6-40_41 |
| Sensor
extension cable |
6-42_45 |
| Servo
amplifiers, PZT |
6-6,
6-40_41 |
| Servo
loop |
4-20,
4-36 |
| Servo
noise, MicroPositioning |
7-96 |
| Servo
power amplifiers, MicroPositioning |
9-3 |
| Servo-controllers,
PZT |
6-6,
6-40_41 |
| Servo-controllers,
MicroPositioning |
9-4 |
| Settling |
4-36,
6-40_41,
8-16 |
| Shear
actuators |
1-2,
4-13 |
| Shock-waves |
4-29 |
| SignalPreshapingTM |
4-37 |
| Single-Module
XY Piezo NanoPositioners |
2-8,
4-1 |
| Sintering
temperature |
4-16 |
| Sinusoidal
operation |
4-27 |
| Six-axis
MicroMotion robot |
7-16,
8-8 |
| Small-signal
stiffness |
4-24 |
| Smart
structures |
1-3,
4-4,
6-3 |
| Software |
|
| ~for
fiber alignment |
8-2,
8-10,
8-17 |
| ~for
IntellistagesTM |
7-44 |
| ~for
MicroMotion robot |
7-16,
8-10 |
| ~for
MicroPositioners |
9-11
末 9-16 |
| ~for
NanoAutomation® controller |
6-9,
6-13 |
| ~LabViewTM
drivers |
2-36,
6-37,
7-19,
8-8,
8-16,
9-6,
9-12,
9-14 |
| ~libraries
for C, Pascal, etc. |
7-19,
9-12,
9-14 |
| ~MotionBasicTM |
9-8 |
| ~NanoCaptureTM |
6-9 |
| Solid
state actuators |
4-18 |
| Spring
preloaded actuators |
1-7,
1-8,
4-17,
4-41 |
| Sputter |
A-9,
4-2,
4-16 |
| Square
wave |
4-35 |
| Stack |
|
| ~actuators |
1-8,
4-13,
4-30 |
| ~translators |
4-41 |
| Static
large-signal stiffness |
4-24 |
| Stepper |
|
| ~actuators |
7-72 |
| ~motors |
7-5
末 7-6, 7-15 |
| StepperMike
actuator |
7-68
末 7-74 |
| Stepper-Mike
motorized actuators |
7-78 |
| Stepper-motor
controllers |
9-5 |
| STM
(scanning tunnelling microscope) |
5-2,
A-12 |
| Strain |
4-21,
4-23 |
| ~gauge
position sensor |
1-39,
4-21 |
| Stress-relieved
aluminum stage |
7-34,
7-36,
7-38,
7-40,
7-44,
7-46 |
| Subaru
telescope |
3-3 |
| Sub-nanometer |
1-2,
2-2,
3-2,
4-20,
4-45 |
| ~flatness |
2-2,
7-13 |
| ~resolution |
4-18,
2-22,
7-96 |
| Sub-nanometer-resolution
capacitive sensor |
5-4 |
| Surface
inspection interferometer |
A-5 |
| Surface
profiler |
4-14 |
| Surgical
robot |
7-16 |
| Switching
of valves/shutters |
1-34,
4-29 |
| Symbols
and units |
4-48,
4-8,
4-17 |
| |
|
| |
|
| Tangent-arm
rotation stages |
7-50
末 7-55 |
| Telescopes |
A-19,
3-2 |
| Temperature
effects |
|
| ~PZT |
4-38 |
| ~capacitive
sensors |
5-5,
5-7 |
| Tensile
force on PZT |
1-7,
1-42,
2-44,
4-23,
4-27 |
| Thermal
compensation |
1-43,
4-38 |
| Thermal
stability |
3-7,
4-38 |
| Three-point
piezo drive |
3-7 |
| Three-point
support set |
7-93 |
| Throughput |
4-36,
4-45,
6-12,
7-16,
8-4 |
| Tilt
platforms |
3-1ff. |
| Tilt
stage Selection Guide |
3-5,
7-6 |
| Tip/tilt
stages |